Assignee
Inventors
- James P. Doyle (42 patents)
- Bruce G. Elmegreen (42 patents)
- Lia Krusin-Elbaum (37 patents)
- Chung H. Lam (354 patents)
- Xiao Hu Liu (87 patents)
- Dennis M. Newns (75 patents)
- Christy S. Tyberg (34 patents)
US Patent 7491965 · Granted Feb 17, 2009