Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Treating a liner layer to reduce surface oxides

Treating a liner layer to reduce surface oxides

US Patent 7470617 · Granted Dec 30, 2008

Estimated economic value: $13,967,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of forming low-resistivity Ru ALD through a bi-layer process and related 2025
Subtractively patterned interconnect structures for integrated circuits2025
Nanosheet transistor devices and related fabrication methods2025
Integrated circuit interconnect structures with graphene cap2025
Cobalt based interconnects and methods of fabrication thereof2025
Stacked transistors having an isolation region therebetween and a common gate el2025
Interconnect wires including relatively low resistivity cores2025
Subtractively patterned interconnect structures for integrated circuits2024
Integrated circuit devices including a via and methods of forming the same2024
Interconnect structures and methods of fabrication2024
Interconnect wires including relatively low resistivity cores2024
Cobalt based interconnects and methods of fabrication thereof2024