Insulating film and method of producing semiconductor device

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Takeshi Fukada (70 patents)
• Mitsunori Sakama (88 patents)
• Yukiko Uehara (20 patents)
• Hiroshi Uehara (128 patents)

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