Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas cluster-ion irradiation apparatus

Gas cluster-ion irradiation apparatus

US Patent 7405394 · Granted Jul 29, 2008

Estimated economic value: $327,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Air conditioning system, abnormality estimation method for air conditioning syst2025
Pd-supporting Zr-based composite oxide2021
Composite oxide2019
Electric vehicle power conversion system2019
AlGaInP-based semiconductor laser2019
Power conversion system for electric vehicles2018
Substrate cleaning method, substrate cleaning device, and vacuum processing devi2018
Substrate cleaning method, substrate cleaning device, and vacuum processing devi2018
Small-circuit-scale reference voltage generating circuit2017
Semiconductor optical device and manufacturing method thereof2017
Method of smoothing solid surface with gas cluster ion beam and solid surface sm2017
Method of smoothing solid surface with gas cluster ion beam and solid surface sm2017