Assignee
Inventors
- Changhua Chen (20 patents)
- Michael D. Camras (59 patents)
- Gina L. Christenson (3 patents)
- R. Scott Kern (13 patents)
- Chihping Kuo (10 patents)
- Paul Scott Martin (79 patents)
- Daniel A. Steigerwald (35 patents)
- Werner Goetz (33 patents)