Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › De-focus uniformity correction

De-focus uniformity correction

US Patent 7333176 · Granted Feb 19, 2008

Estimated economic value: $2,356,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for region of interest processing for reticle particle detection2025
Distributed attribute based access control as means of data protection and colla2025
Metrology tool with position control of projection system2025
Reticle gripper damper and isolation system for lithographic apparatuses2025
Focused image grabbing2024
Lithographic apparatus and ultraviolet radiation control system2024
Lithographic apparatus, substrate table, and non-uniform coating method2024
Beam splitting prism systems2021
Inspection apparatus having non-linear optics2020
Beam splitting prism systems2020
Double EUV illumination uniformity correction system and method2015
Linear motor magnetic shield apparatus for lithographic systems2015