Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle trap for electrostatic chuck

Particle trap for electrostatic chuck

US Patent 7317606 · Granted Jan 8, 2008

Estimated economic value: $14,915,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias vo2023
Integrated system and method2022
Objective lens arrangement2022
Charged particle beam source and a method for assembling a charged particle beam2021
Method and system for evaluating objects2021
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chambe2021
Charged particle beam source and a method for assembling a charged particle beam2021
System for inspecting and reviewing a sample2019
Multi mode systems with retractable detectors2018
System and method for forming a sealed chamber2018
Method and system for moving a substrate2018
Method for targeted resource virtualization in containers2018