Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same

Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same

US Patent 7288364 · Granted Oct 30, 2007

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Foldable ramp2024
Block-type prefabricated ramp2023
Nano-scale structures2019
Methods of forming fine patterns2018
Fine pattern structures having block co-polymer materials2017
Methods of forming different sized patterns2017
Methods of forming patterns2017
Methods of forming patterns with block copolymer2017
Reflective mask and method of fabricating the same2017
Methods of forming patterns2016
Methods for forming patterns in honeycomb array2016
Methods of forming different sized patterns2016