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Home › Fluorinated polymers having polycyclic groups with fused 4-membered carbocyclic rings, useful as photoresists, and processes for microlithography

Fluorinated polymers having polycyclic groups with fused 4-membered carbocyclic rings, useful as photoresists, and processes for microlithography

US Patent 7264914 · Granted Sep 4, 2007

Estimated economic value: $10,416,000 ⓘ

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