Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 7259832 · Granted Aug 21, 2007

Estimated economic value: $4,658,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Coil assembly for magnetic actuator, magnetic actuator and manufacturing method2023
Actuator, positioning device, lithographic apparatus, and method for manufacturi2019
Speed sensor2014
Magnetic actuator2014
Method of preparing components, prepared component, lithographic apparatus and d2011
Gas bearing, and lithographic apparatus provided with such a bearing2011
Magnet assembly, linear actuator, planar motor and lithographic apparatus2009
Positioning device and lithographic apparatus2008
Lithographic apparatus and actuator2008
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas2007
Lithographic apparatus, device manufacturing method and computer program2007
Lithographic optical system2007