Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure method and apparatus

Exposure method and apparatus

US Patent 7221434 · Granted May 22, 2007

Estimated economic value: $594,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Molding apparatus and article manufacturing method2025
Imprint apparatus, imprint method, and article manufacturing method2023
Imprint apparatus, operation method of imprint apparatus, and article manufactur2022
Imprint method and article manufacturing method2022
Imprint apparatus, imprint method, and method of manufacturing article2020
Imprint method2020
Imprint apparatus2018
Imprint method for an imprint apparatus which transfers a pattern onto a substra2018
Imprint apparatus and method of manufacturing article2017
Imprint lithography apparatus and device manufacturing method therefor2017
Imprint apparatus, imprint method, and device manufacturing method2017
Forming method and method of manufacturing article2017