Low activation energy photoresists

Assignee

• IBM

Inventors

• Robert David Allen (115 patents)
• Gregory Breyta (59 patents)
• Phillip Brock (58 patents)
• Richard Anthony DiPietro (83 patents)
• Ratnam Sooriyakumaran (119 patents)
• Hoa D. Truong (37 patents)
• Gregory Michael Wallraff (59 patents)

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