Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Processing system and method for thermally treating a substrate

Processing system and method for thermally treating a substrate

US Patent 7079760 · Granted Jul 18, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Compact low angle ion beam extraction assembly and processing apparatus2025
Substrate halo arrangement for improved process uniformity2024
Apparatus and system including high angle extraction optics2024
Tunable extraction assembly for wide angle ion beam2022
Apparatus and system including high angle extraction optics2022
Methods and systems for turbulent, corrosion resistant heat exchangers2021
Desiccant air conditioning methods and systems2020
Methods and systems for turbulent, corrosion resistant heat exchangers2019
Gas injection system for ion beam device2018
Gas injection system for ion beam device2018
Methods and systems for turbulent, corrosion resistant heat exchangers2017
Desiccant air conditioning systems with conditioner and regenerator heat transfe2017