Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illumination optical system and method, and exposure apparatus

Illumination optical system and method, and exposure apparatus

US Patent 7079220 · Granted Jul 18, 2006

Estimated economic value: $268,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Illumination optical system and exposure apparatus having the same2007
Illumination optical system and method, and exposure apparatus2006
Illumination optical system and exposure apparatus having the same2005
Illumination apparatus, projection exposure apparatus, and device fabricating me2004
Exposure method and device manufacturing method using the same2003
Exposure apparatus that illuminates a mark and causes light from the mark to be 2003
Method and apparatus for inspecting a surface state1999
Inspection apparatus, and exposure apparatus and device manufacturing method usi1998
Inspection system for original with pellicle1997
Surface-condition inspection method and apparatus including a plurality of detec1997
Surface state inspecting system including a scanning optical system for scanning1997
Surface inspecting device1996