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Home › Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light

Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light

US Patent 5591985 · Granted Jan 7, 1997

Estimated economic value: $40,000 ⓘ

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