Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Radio frequency Langmuir probe

Radio frequency Langmuir probe

US Patent 7015703 · Granted Mar 21, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for process control of semiconductor manufacturing equipment2006
Fault classification in a plasma process chamber2004
Endpoint detection in the etching of dielectric layers2004
RF current sensor2002
Method of processing a high frequency signal containing multiple fundamental fre2002
Apparatus for sensing RF current delivered to a plasma with two inductive loops2000
Apparatus for sensing RF current delivered to a plasma with two inductive loops1998