Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multiple alternating phase shift technology for amplifying resolution

Multiple alternating phase shift technology for amplifying resolution

US Patent 7001695 · Granted Feb 21, 2006

Estimated economic value: $3,083,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Maskless vortex phase shift optical direct write lithography2015
Maskless vortex phase shift optical direct write lithography2013
Maskless vortex phase shift optical direct write lithography2011
Method of aligning deposited nanotubes onto an etched feature using a spacer2010
Optimized mirror design for optical direct write2010
Method of aligning deposited nanotubes onto an etched feature using a spacer2009
Method and systems for utilizing simplified resist process models to perform opt2009
Yield-limiting design-rules-compliant pattern library generation and layout insp2008
Process and apparatus for achieving single exposure pattern transfer using maskl2008
Method and apparatus for verifying the post-optical proximity corrected mask waf2008
Process window compliant corrections of design layout2007
Process window compliant corrections of design layout2007