Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stable energy detector for extreme ultraviolet radiation detection

Stable energy detector for extreme ultraviolet radiation detection

US Patent 6998620 · Granted Feb 14, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for the generation of short-wavelength radiation by means o2013
Method and arrangement for the adjustment of characteristics of a beam bundle of2013
Method and arrangement for cleaning optical surfaces in plasma-based radiation s2012
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas di2005
Radiation source for generating extreme ultraviolet radiation2005
Detector arrangement for energy measurement of pulsed x-ray radiation2005
Radiation source with high average EUV radiation output2004
Method and apparatus for generating high output power gas discharge based source2004
Method for generating extreme ultraviolet radiation based on a radiation-emittin2004
Method and device for producing extreme ultraviolet and soft X-rays from a gaseo2002