Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for reticle protection and transport

System and method for reticle protection and transport

US Patent 6991416 · Granted Jan 31, 2006

Estimated economic value: $4,469,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dynamically pivotable friction drive2025
Automated alignment of a testing system2021
Pneumatic bearing with bonded polymer film wear surface and production method th2019
Lithographic apparatus and method2018
Articulated sample container rack apparatus, rack conveyor systems, and methods 2016
Determining position and curvature information directly from a surface of a patt2016
Plant container cover and insulation2016
Reticle support that reduces reticle slippage2016
Methods, systems, and apparatus adapted to transfer sample containers2015
Methods, systems, and apparatus for calibration of a positional offset between a2015
Lithographic apparatus, projection system and damper for use in a lithographic a2014
Optically compensated unidirectional reticle bender2013