Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of forming nitride films

Methods of forming nitride films

US Patent 6929831 · Granted Aug 16, 2005

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of depositing a layer2005
Method and depositing a layer2004
Methods and apparatus for forming a film on a substrate2003
Method for treating silicon-containing polymer layers with plasma or electromagn2003
Method for treating silicon-containing polymer layers with plasma or electromagn2003
Methods and apparatus for treating a semiconductor substrate2001