Thermally cured underlayer for lithographic application

Assignee

• Arch Specialty Chemicals

Inventors

• Binod B. De (28 patents)
• Sanjay Malik (39 patents)
• Unknown
• John Biafore (36 patents)
• Patrick Foster (12 patents)
• Sidney George Slater (2 patents)
• Thomas Steinhausler (11 patents)
• Andrew J. Blakeney (45 patents)

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