Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Polishing pad window for a chemical-mechanical polishing tool

Polishing pad window for a chemical-mechanical polishing tool

US Patent 6878039 · Granted Apr 12, 2005

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Energy modulation systems for diffraction based holographic displays2024
Foldable aerodynamic drag reducing plate assembly for an intermodal container2020
Foldable aerodynamic drag reducing plate assembly for a domestic or intermodal c2020
Package, packaging method and substrate thereof for sliding type thin fingerprin2011
Carrier head for workpiece planarization/polishing2008
Carrier head for workpiece planarization/polishing2008
CMP apparatus and method2007
Work piece carrier with adjustable pressure zones and barriers and a method of p2006
Work piece carrier with adjustable pressure zones and barriers and a method of p2006
Platen and manifold for polishing workpieces2006
Platen and manifold for polishing workpieces2006
Work piece carrier with adjustable pressure zones and barriers and a method of p2006