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Home › STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASUREMENT METHOD, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE APPARATUS MAINTENANCE METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING FACTORY

STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASUREMENT METHOD, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE APPARATUS MAINTENANCE METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING FACTORY

US Patent 6867849 · Granted Mar 15, 2005

Estimated economic value: $277,000 ⓘ

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