Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of producing micromechanical structures

Method of producing micromechanical structures

US Patent 6839962 · Granted Jan 11, 2005

Estimated economic value: $46,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lateral field excitation acoustic resonator2025
Top electrodes and dielectric spacer layers for bulk acoustic wave resonators2025
Bulk acoustic wave filter structure with conductive bridge forming electrical lo2025
Top electrodes and dielectric spacer layers for bulk acoustic wave resonators2024
Method of forming RF devices with enhanced performance including attaching a waf2024
Top electrodes and dielectric spacer layers for bulk acoustic wave resonators2023
Bulk acoustic wave filter structure with conductive bridge forming electrical lo2022
Top electrodes with step arrangements for bulk acoustic wave resonators2022
Methods for fabrication of bonded wafers and surface acoustic wave devices using2022
Zero-output coupled resonator filter and related radio frequency filter circuit2021
Coupled resonator structure2021
Bulk acoustic wave (BAW) resonator2021