Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6839962 | Method of producing micromechanical structures | Robert Aigner, Sven Michaelis, Michael Brauer | 2005-01-11 |
| 6734770 | Microrelay | Robert Aigner, Sven Michaelis | 2004-05-11 |