Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer cassette pod equipped with position sensing device

Wafer cassette pod equipped with position sensing device

US Patent 6775918 · Granted Aug 17, 2004

Estimated economic value: $2,717,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Manufacturing method of semiconductor device and semiconductor processing system2024
Manufacturing method of semiconductor device and semiconductor processing system2022
Manufacturing method of semiconductor device and semiconductor processing system2021
Method for monitoring gas in wafer processing system2021
Photoresist bottle container2021
Soft material wafer bonding and method of bonding2014
Wafer and method of processing wafer2013
Exhaust system and mini-exhaust static pressure controlling apparatus thereof2008
Fault detection and classification (FDC) specification management apparatus and 2007
Chamber wafer detection2005
Wafer transport pod with linear door opening mechanism2004
Apparatus and method for transferring wafers by robot2001