Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chamber for uniform substrate heating

Chamber for uniform substrate heating

US Patent 6765178 · Granted Jul 20, 2004

Estimated economic value: $36,932,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of purifying target material for an EUV light source2022
Method and apparatus for purifying target material for EUV light source2019
Target cooling through gun drilled holes2019
Manufacturing design and processing methods and apparatus for sputtering targets2016
Corrosion resistant electrodes for laser chambers2016
Cooled PVD shield2015
Ganged scanning of multiple magnetrons, especially two level folded magnetrons2015
Washing machine, and ozone generator2014
Vehicle drive apparatus2014
Wheel brake/drive force control device2014
Linear plasma system2013
Reactive sputtering chamber with gas distribution tubes2013