Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same

Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same

US Patent 6756599 · Granted Jun 29, 2004

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Particle-optical systems and arrangements and particle-optical components for su2019
Particle-optical systems and arrangements and particle-optical components for su2017
Particle-optical systems and arrangements and particle-optical components for su2015
Particle-optical systems and arrangements and particle-optical components for su2014
Method for repairing phase shift masks2012
Method and apparatus for analyzing a group of photolithographic masks2012
Particle-optical systems and arrangements and particle-optical components for su2012
Method and arrangement for repairing photolithography masks2011
Particle-optical systems and arrangements and particle-optical components for su2009
Particle-optical systems and arrangements and particle-optical components for su2007
Beam guiding arrangement, imaging method, electron microscopy system and electro2006
Apparatus and method for exposing a radiation sensitive layer by means of charge2006