{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method of dry etching a semiconductor device in the absence of a plasma", "item": "https://www.patentleaderboard.com/patent/6730600"}]}

Home › Method of dry etching a semiconductor device in the absence of a plasma

Method of dry etching a semiconductor device in the absence of a plasma

US Patent 6730600 · Granted May 4, 2004

Assignee

Agere Systems

Inventors

Nace Layadi (26 patents)
Simon John Molloy (52 patents)
Sailesh Mansinh Merchant (135 patents)
Isik C. Kizilyalli (128 patents)

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