Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron beam generating apparatus and electron beam exposure apparatus

Electron beam generating apparatus and electron beam exposure apparatus

US Patent 6727658 · Granted Apr 27, 2004

Estimated economic value: $155,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Technique for treating cancer using structurally-reinforced S-TuD2022
Electron gun device2022
Method for suppressing tumors by miR-200 family inhibition2022
Structurally-enhanced miRNA inhibitor S-TuD2020
Non-aqueous secondary battery, mounted unit, and method for manufacturing non-aq2016
Method for inhibiting function of micro-RNA2013
Stage device2013
Multi-column electron beam exposure apparatus and magnetic field generation devi2013
Multi-column electron beam exposure apparatus and magnetic field generation devi2013
Electron gun minimizing sublimation of electron source and electron beam exposur2012
Electron gun, electron beam exposure apparatus, and exposure method2011
Electron gun, electron beam exposure apparatus, and exposure method2011