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Home › System to determine suitability of sion arc surface for DUV resist patterning

System to determine suitability of sion arc surface for DUV resist patterning

US Patent 6597463 · Granted Jul 22, 2003

Estimated economic value: $3,195,000 ⓘ

Assignee

AMD

Inventors

Bhanwar Singh (259 patents)
Cristina Cheung (2 patents)
Jay Bhakta (1 patents)
Carmen Morales (14 patents)
Junwei Bao (129 patents)

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