Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for using latency time as a run-to-run control parameter

Method and apparatus for using latency time as a run-to-run control parameter

US Patent 6571371 · Granted May 27, 2003

Estimated economic value: $3,164,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Parallel fault detection2013
Associating data with workpieces and correlating the data with yield data2012
System for brokering fault detection data2012
Method and apparatus for correlating test equipment health and test results2010
Methods and systems for analyzing process equipment processing variations using 2010
Method and apparatus for matching test equipment calibration2010
Initiating test runs based on fault detection results2009
Method and apparatus for fault detection classification of multiple tools based 2008
Fault notification based on a severity level2007
Fault notification based on a severity level2007
Mask identification database server2007
Method of dynamically designing a preventative maintenance schedule based upon s2006