Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for producing an alternating phase mask

Method for producing an alternating phase mask

US Patent 6569772 · Granted May 27, 2003

Estimated economic value: $132,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for producing microcomponents and use of2014
Flow control valves2013
Vibration-decoupling device for hydraulics2013
Method for producing a structure on the surface of a substrate2011
Methods of manufacturing semiconductor structures2011
Pharmaceutical compositions comprising an anti-teratogenic compound and applicat2010
Apparatus for generating excited and/or ionized particles in a plasma and a meth2010
Masks for lithographic imagings and methods for fabricating the same2009
Method for exposing a semiconductor wafer by applying periodic movement to a com2008
Method for producing a structure on the surface of a substrate2008
Phase shift mask2008
Method for forming a structure element on a wafer by means of a mask and a trimm2007