Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for examining specimen with a charged particle beam

Apparatus and method for examining specimen with a charged particle beam

US Patent 6555815 · Granted Apr 29, 2003

Estimated economic value: $17,791,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for inspecting a specimen and charged particle beam device2025
Method of influencing a charged particle beam, multipole device, and charged par2022
Charged particle beam apparatus, multi-beamlet assembly, and method of inspectin2022
Charged particle beam device and method for inspecting and/or imaging a sample2022
Method of operating a charged particle gun, charged particle gun, and charged pa2022
Charged particle beam device and method for inspecting and/or imaging a sample2021
Charged particle beam device, interchangeable multi-aperture arrangement for a c2021
Method of operating a charged particle gun, charged particle gun, and charged pa2020
Device and method for operating a charged particle device with multiple beamlets2020
Charged particle beam device, multi-beam blanker for a charged particle beam dev2020
Charged particle beam device, multi-beam blanker for a charged particle beam dev2019
Charged particle beam device, charged particle beam influencing device, and meth2019