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Home › Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer

Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer

US Patent 6518166 · Granted Feb 11, 2003

Estimated economic value: $2,923,000 ⓘ

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