Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for detecting and categorizing defects

Method for detecting and categorizing defects

US Patent 6496596 · Granted Dec 17, 2002

Estimated economic value: $3,175,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for detecting sequential processing effects using on-tool randomization2005
Apparatus for the application of developing solution to a semiconductor wafer2004
Method for ultra thin resist linewidth reduction using implantation2003
Low defect organic BARC coating in a semiconductor structure2002
Optimization of organic bottom anti-reflective coating (BARC) thickness for dual2002
Hardmask trim process2002
Semiconductor wafer alignment method using an identification scribe2002
Mask, structures, and method for calibration of patterned defect inspections2002
Method for coating ultra-thin resist films2001
Defect collecting structures for photolithography2001
Method for developing ultra-thin resist films2001
Liquid chemical container with integrated fluid reservoir2001