Method and device for transferring wafers

Assignee

• Asm International N.V.

Inventors

• Albert Hasper (14 patents)
• Frank Huussen (19 patents)
• Cornelis Kooijman (12 patents)
• Theodorus Gerardus Maria Oosterlaken (16 patents)
• Jack Herman Van Putten (4 patents)
• Christianus Gerardus Maria Ridder (2 patents)
• Gert-Jan Snijders (19 patents)
• Jeroen Stoutjesdijk (10 patents)
• Jan Zinger (13 patents)

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