Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for side wall passivation for organic etch

Method and apparatus for side wall passivation for organic etch

US Patent 6465159 · Granted Oct 15, 2002

Estimated economic value: $3,906,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature control apparatus for semiconductor processing equipment, and temper2025
Control method for multi-zone active-matrix temperature control in plasma proces2025
Plasma treatment apparatus, lower electrode assembly and forming method thereof2025
Multi-zone temperature control plasma reactor2024
Plasma reactor having a variable coupling of low frequency RF power to an annula2024
Radio frequency power supply system, plasma processor, and frequency-tuning matc2023
Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatus2023
Capacitively coupled plasma etching apparatus2023
Lift pin assembly, an electrostatic chuck and a processing apparatus where the e2023
Plasma processor and processing method2023
Capacitively coupled plasma etching apparatus2022
Uniform pumping dual-station vacuum processor2022