Method and apparatus for controlling rise and fall of temperature in semiconductor substrates

Assignee

• Toshiba Ceramics Co.
• Toshiba Kikai

Inventors

• Shyuji Tobashi (2 patents)
• Tadashi Ohashi (31 patents)
• Katsuyuki Iwata (12 patents)
• Hiroyuki Saito (357 patents)
• Shinichi Mitani (57 patents)
• Takaaki Honda (14 patents)
• Hideki Arai (35 patents)
• Yoshitaka Murofushi (1 patents)
• Kunihiko Suzuki (209 patents)
• Hidenori Takahashi (118 patents)
• Hideki Ito (170 patents)
• Hirofumi Katsumata (5 patents)

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