Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461428 | Method and apparatus for controlling rise and fall of temperature in semiconductor substrates | Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Hiroyuki Saito, Shinichi Mitani +6 more | 2002-10-08 |
| 6250914 | Wafer heating device and method of controlling the same | Hideki Ito, Hidenori Takahashi, Tadashi Ohashi, Shuji Tobashi, Katsuyuki Iwata | 2001-06-26 |
| 5486105 | Apparatus for controlling a heating temperature | — | 1996-01-23 |
| 5272644 | Apparatus for controlling a heating temperature | Hideo Fujie, Kazuto Tomikawa, Yasuhiko Nagakura | 1993-12-21 |
| 4750104 | Method of and apparatus for tracking position error control | Satoshi Kumamoto, Hideo Fujie | 1988-06-07 |