Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illumination optical system and exposure apparatus having the same

Illumination optical system and exposure apparatus having the same

US Patent 6441886 · Granted Aug 27, 2002

Estimated economic value: $223,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser annealing apparatus and method for manufacturing electronic device2024
Multifunctional engineered particle for a secondary battery and method of manufa2024
Multifunctional engineered particle for a secondary battery and method of manufa2024
Laser radiation system and method for manufacturing electronic device2023
Sliding material composition, sliding molded article, and sliding member2022
Beam transmission system, exposure device, and illumination optical system of th2020
Laser irradiation apparatus2018
Laser system2018
Laser system2018
Imprint apparatus and article manufacturing method2018
Exposure apparatus2017
Imprint apparatus including alignment and overlay measurement2017