Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and device for loading a susceptor

Method and device for loading a susceptor

US Patent 6435797 · Granted Aug 20, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for depositing a material layer originating from process ga2019
Method and apparatus for depositing a material layer originating from process ga2019
Apparatus and process for producing a single crystal of silicon2017
Apparatus and process for producing a crystal of semiconductor material2017
Method for producing a silicon single crystal2016
Device for depositing a layer on a semiconductor wafer by means of vapour deposi2015
Method and apparatus for depositing a layer on a semiconductor wafer by vapor de2015
Method for identifying an incorrect position of a semiconductor wafer during a t2013
Method for depositing a layer on a semiconductor wafer by means of CVD and chamb2012
Method for depositing a layer on a semiconductor wafer by means of CVD and chamb2012
Epitaxially coated silicon wafer and method for producing epitaxially coated sil2012
Method and device for regulating the differential pressure in epitaxy reactors2005