Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System using a polar coordinate stage and continuous image rotation to compensate for stage rotation

System using a polar coordinate stage and continuous image rotation to compensate for stage rotation

US Patent 6320609 · Granted Nov 20, 2001

Estimated economic value: $6,704,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scanning focal length metrology2012
Scanning focal length metrology2012
Scanning focal length metrology2010
Spectrometer measurement of diffracting structures2008
Metrology/inspection positioning system2007
Metrology/inspection positioning system2007
Metrology/inspection positioning system2007
Image control in a metrology/inspection positioning system2007
Image control in a metrology/inspection positioning system2007
Image control in a metrology/inspection positioning system2007
Apparatus and method for the measurement of diffracting structures2006
Edge grip chuck2006