{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Substrate support and lift apparatus and method", "item": "https://www.patentleaderboard.com/patent/6315878"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support and lift apparatus and method

Substrate support and lift apparatus and method

US Patent 6315878 · Granted Nov 13, 2001

Estimated economic value: $124,569,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of assembling drift tube assemblies in ion implantors2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Three layer resonator coil for linear accelerator2025
Linear accelerator assembly including flexible high-voltage connection2025
Processing chamber with annealing mini-environment2025
Resonator, linear accelerator, and ion implanter having dielectric-free resonato2024
Robot for simultaneous substrate transfer2024
Resonator, linear accelerator configuration and ion implantation system having r2024
High-density substrate processing systems and methods2024
Isolation valve2024
Linear accelerator coil including multiple fluid channels2024