Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Capacitively coupled RF-plasma reactor

Capacitively coupled RF-plasma reactor

US Patent 6281469 · Granted Aug 28, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma reactor vessel having improved plasma uniformity comprised of a first ele2020
Disconnectable submerged buoy mooring device comprising clamping dogs2018
Disconnectable turret mooring system2016
RF plasma reactor having a distribution chamber with at least one grid2015
Voltage non-uniformity compensation method for high frequency plasma reactor for2011
Voltage non-uniformity compensation method for high frequency plasma reactor for2011
Plasma reactor for the treatment of large size substrates2010
Voltage non-uniformity compensation method for high frequency plasma reactor for2010
Voltage non-uniformity compensation method for high frequency plasma reactor for2010
Plasma reactor for the treatment of large size substrates2010
Lifting and supporting device2010
Lifting and supporting device2010