Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Three chamber load lock apparatus

Three chamber load lock apparatus

US Patent 6250869 · Granted Jun 26, 2001

Estimated economic value: $57,772,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for displacing fluids from substrates using supercritical 2015
Cluster tool process chamber having integrated high pressure and vacuum chambers2010
Cluster tool process chamber having integrated high pressure and vacuum chambers2008
Single wafer load lock with internal wafer transport2004
Single shaft, dual cradle vacuum slot valve2003
Methods of implementing a single shaft, dual cradle vacuum slot valve2003
Three chamber load lock apparatus2002
Single shaft dual cradle vacuum slot valve2002
Atmospheric wafer transfer module with nest for wafer transport robot2001
Mechanically clamping robot wrist2001
Dual sided slot valve and method for implementing the same2000
Adjustable frog-leg robot2000