Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of fabricating shallow trench isolation

Method of fabricating shallow trench isolation

US Patent 6245635 · Granted Jun 12, 2001

Estimated economic value: $1,530,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for founding establishment through internet2008
Method making bonding pad2006
Interconnect structure with an enlarged air gaps disposed between conductive str2005
Interconnect structure with an enlarged air gaps disposed between conductive str2005
Interconnect structure with an enlarged air gaps disposed between conductive str2005
Bonding pad structure2004
Reducing relative stress between HDP layer and passivation layer2003
Method for forming an interconnect structure with air gap compatible with unland2002
Interconnect structure with air gap compatible with unlanded vias2002
Method of fabricating copper interconnection2001
Dual damascene structure and its manufacturing method1999
Clothes hanger support1984