Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › On the fly center-finding during substrate handling in a processing system

On the fly center-finding during substrate handling in a processing system

US Patent 6198976 · Granted Mar 6, 2001

Estimated economic value: $102,443,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of low-temperature/BEOL-compatible highly scalable graphene synthesis2025
Low-temperature/beol-compatible highly scalable graphene synthesis tool2025
Low-temperature/BEOL-compatible highly scalable graphene synthesis tool2024
Wafer processing system with chuck assembly maintenance module2017
Method and apparatus for robot calibrations with a calibrating device2014
Electrostatic end effector apparatus, systems and methods2013
Method and system for robot calibrations with a camera2012
Method and apparatus for robot calibrations with a calibrating device2012
Detection apparatus and method2012
High precision infusion pump controller2012
High precision infusion pumps2012
Detection apparatus and method2012