Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deformable mirror with removable actuator using shaped-memory alloys

Deformable mirror with removable actuator using shaped-memory alloys

US Patent 6181459 · Granted Jan 30, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pneumatic control system and method for shaping deformable mirrors in lithograph2002
Kinematic actuator deformable mirror2000
Innovative deformable mirror actuator configuration1998
Replaceable actuator assembly for optical mirror with kinematic mount1996
Method for use in fabricating and/or testing a thin mirror1995
X-ray mask ring and apparatus for making same1986
X-Ray lithography system1985
Mask ring assembly for X-ray lithography1985
Actuator1985
Compression base lamp1984
Technique to modify wafer geometry1984
Precise lamp positioner1983