Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › X-Ray lithography system

X-Ray lithography system

US Patent 4539695 · Granted Sep 3, 1985

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pneumatic control system and method for shaping deformable mirrors in lithograph2002
Deformable mirror with removable actuator using shaped-memory alloys2001
Kinematic actuator deformable mirror2000
Innovative deformable mirror actuator configuration1998
Replaceable actuator assembly for optical mirror with kinematic mount1996
Method for use in fabricating and/or testing a thin mirror1995
X-ray mask ring and apparatus for making same1986
Mask ring assembly for X-ray lithography1985
Actuator1985
Compression base lamp1984
Technique to modify wafer geometry1984
Precise lamp positioner1983